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Gardner, Julian W.

Microsensors MEMS and Smart Devices - New Delhi Wiley India Pvt. Ltd. 2013 - 503

From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem

Contents:
Electronic Materials and Processing

• MEMS Materials and their Preparation

• Standard Microelectronic Technologies

• Silicon Micromachining: Bulk

• Silicon Micromachining: Surface

• Microstereolithography for MEMS

• Micro sensors

• Introduction to SAW Devices

• Surface Acoustic Waves in Solids

• IDT Micro sensor Parameter Measurement

• IDT Micro sensor Fabrication

• IDT Micro sensor

• MEMS-IDT Micro sensor

• Smart Sensors and MEMS

ISBN: 978-81-265-4082-2

Publisher. No.: Allied Informatics, Jaipur

Subjects--Topical Terms:
Electronics

Dewey Class. No.: 621.381 / GAR

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