Fundamentals of Semiconductor Fabrication
By: May, Gary S.
Contributor(s): Sze, Simon M.
Material type:
BookPublisher: New Delhi Wiley India Pvt. Ltd. India 2016,c2004Description: 305.ISBN: 9788126532605.Subject(s): ElectronicsDDC classification: 621.381.52
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| 621.381 5 MAI Digital Electronics : Principles and Integrated Circuits | 621.381 5 MIL Integrated Electronics : Analog and digital Circuits and system | 621.381 5 SOC Design and Application of Analog Integrated Circuits | 621.381.52 MAY . Fundamentals of Semiconductor Fabrication | 621.381 52 SZE Semiconductor Devices : Physics and Technology | 621.381 52 SZE Physics of Semiconductor Devices | 621.381 52 SZE Semiconductor Devices : Physics and Technology |
From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
Contents
· Introduction.
· Crystal Growth.
· Silicon Oxidation.
· Photolithography.
· Etching.
· Diffusion.
· Ion Implantation.
· Film Deposition.
· Process Integration.
· IC Manufacturing.
· Future Trends and Challenges.
Appendix A: List of Symbols.
Appendix B: International System of Units (SI Units).
Appendix C: Unit Prefixes.
Appendix D: Greek Alphabet.
Appendix E: Physical Constants.
Appendix F: Properties of Si and GaAs at 300 K.
Appendix G: Some Properties of the Error Function.
Appendix H: Basic Kinetic Theory of Gases.
Appendix I: SUPREM Commands.
Appendix J: Running PROLITH.
Appendix K. Percentage Points of the t Distribution.
Appendix L: Percentage Points of the F Distribution.
Index.
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