Gardner, Julian W. <br/><br/>
Microsensors MEMS and Smart Devices 

 - New Delhi  Wiley India Pvt. Ltd.  2013 
 - 503 
<br/><br/> From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem 
<br/><br/>Contents:<br/>Electronic Materials and Processing<br/><br/>•	MEMS Materials and their Preparation<br/><br/>•	Standard Microelectronic Technologies<br/><br/>•	Silicon Micromachining: Bulk<br/><br/>•	Silicon Micromachining: Surface<br/><br/>•	Microstereolithography for MEMS<br/><br/>•	Micro sensors<br/><br/>•	Introduction to SAW Devices<br/><br/>•	Surface Acoustic Waves in Solids<br/><br/>•	IDT Micro sensor Parameter Measurement<br/><br/>•	IDT Micro sensor Fabrication<br/><br/>•	IDT Micro sensor<br/><br/>•	MEMS-IDT Micro sensor<br/><br/>•	Smart Sensors and MEMS 
<br/><br/><label>ISBN: </label>978-81-265-4082-2 
<br/><br/><label>Publisher. No.: </label> Allied Informatics, Jaipur 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronics 
<br/><br/><label>Dewey Class. No.: </label>621.381  / GAR