Fundamentals of Semiconductor Fabrication
- New Delhi Wiley India Pvt. Ltd. India 2016,c2004
- 305
From crystal growth to integrated devices and circuits, this new book offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence.
Contents · Introduction.
· Crystal Growth.
· Silicon Oxidation.
· Photolithography.
· Etching.
· Diffusion.
· Ion Implantation.
· Film Deposition.
· Process Integration.
· IC Manufacturing.
· Future Trends and Challenges.
Appendix A: List of Symbols.
Appendix B: International System of Units (SI Units).
Appendix C: Unit Prefixes.
Appendix D: Greek Alphabet.
Appendix E: Physical Constants.
Appendix F: Properties of Si and GaAs at 300 K.
Appendix G: Some Properties of the Error Function.
Appendix H: Basic Kinetic Theory of Gases.
Appendix I: SUPREM Commands.
Appendix J: Running PROLITH.
Appendix K. Percentage Points of the t Distribution.
Appendix L: Percentage Points of the F Distribution.