000 | 01576nam a22002417a 4500 | ||
---|---|---|---|
999 |
_c2032 _d2032 |
||
003 | OSt | ||
005 | 20181205134407.0 | ||
008 | 181205b ||||| |||| 00| 0 eng d | ||
020 | _a978-81-265-4082-2 | ||
028 |
_bAllied Informatics, Jaipur _c5670 _d27/11/2018 _q2018-19 |
||
040 |
_aBSDU _bEnglish _cBSDU |
||
082 |
_a621.381 _bGAR |
||
100 | _aGardner, Julian W. | ||
245 | _aMicrosensors MEMS and Smart Devices | ||
260 |
_aNew Delhi _bWiley India Pvt. Ltd. _c2013 |
||
300 | _a503 | ||
500 | _aFrom smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem | ||
504 | _aContents: Electronic Materials and Processing • MEMS Materials and their Preparation • Standard Microelectronic Technologies • Silicon Micromachining: Bulk • Silicon Micromachining: Surface • Microstereolithography for MEMS • Micro sensors • Introduction to SAW Devices • Surface Acoustic Waves in Solids • IDT Micro sensor Parameter Measurement • IDT Micro sensor Fabrication • IDT Micro sensor • MEMS-IDT Micro sensor • Smart Sensors and MEMS | ||
650 | _aElectronics | ||
700 | _aVaradan, Vijay K. | ||
700 | _aAwadeldarim, Osama O. | ||
942 |
_2ddc _cBK |