Microsensors MEMS and Smart Devices
By: Gardner, Julian W.
Contributor(s): Varadan, Vijay K | Awadeldarim, Osama O.
Material type:
BookPublisher: New Delhi Wiley India Pvt. Ltd. 2013Description: 503.ISBN: 978-81-265-4082-2.Subject(s): ElectronicsDDC classification: 621.381
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
Books
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BSDU Knowledge Resource Center, Jaipur General Stacks | 621.381 GAR (Browse shelf) | Available | 017642 |
From smart wallpaper designed to reduce noise in helicopters to the electronic tongues used in the food industry, smart devices are having a growing impact. Gardner and Varadan report on recent developments in both the integration of a micro sensor and its microelectronic circuitry to produce a smart sensor ant the integration of a micro sensor, a Microactuators and their microelectronic circuitry to produce a microsystem
Contents:
Electronic Materials and Processing
• MEMS Materials and their Preparation
• Standard Microelectronic Technologies
• Silicon Micromachining: Bulk
• Silicon Micromachining: Surface
• Microstereolithography for MEMS
• Micro sensors
• Introduction to SAW Devices
• Surface Acoustic Waves in Solids
• IDT Micro sensor Parameter Measurement
• IDT Micro sensor Fabrication
• IDT Micro sensor
• MEMS-IDT Micro sensor
• Smart Sensors and MEMS
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